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Developed a gas filter with a high filtration accuracy of 0.003 μm in a consistently stable state.
This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It is capable of high-temperature baking at 200°C to ensure the removal of impurities such as water and oxygen.
Filtration accuracy
This is an inline ceramic gas filter manufactured by Pureon Japan Co., Ltd., used in semiconductor manufacturing gas lines and other applications.
Achieving low pressure loss while maintaining a high filtration precision of 0.003μm!
This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It can handle approximately twice the flow rate with the same external dimensions as the conventional PGF series.
The SPC series is designed to be ultra-compact (φ21×84mm) and lightweight (90g).
It is ideal for cylinder cabinets and devices with limited installation space.
It is suitable for use in primary bulk gas lines with a flow rate of 500 L/min to 3,000 L/min.
This is a ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications.
